OBSERVATION OF SCATTERING OF PARTICLES PRODUCED BY LASER ABLATION ON A SUBSTRATE BY LASER-INDUCED FLUORESCENCE

被引：20

作者：

OKADA, T

NAKAYAMA, Y

KUMUDUNI, WKA

MAEDA, M

机构：

[1] Department of Electrical Engineering, Kyushu University, Hakozaki

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 19期

关键词：

D O I：

10.1063/1.108246

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The scattering of Ba atoms produced from an ArF laser ablated YBa2Cu3O7-delta target on a Si substrate was directly observed by laser induced fluorescence spectroscopy. A gated diode array determined the spatial and the time of flight (TOF) distributions of the scattered Ba atoms on the substrate. It is shown that a sticking coefficient of Ba atoms was less than unity and Ba atoms were scattered roughly isotropically. The velocity of the scattered atoms is estimated from the TOF distribution.

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页码：2368 / 2370

页数：3

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