PHOTOACOUSTIC MEASUREMENTS OF DOPED SILICON-WAFERS

被引：7

作者：

AMATO, G ^{[1
]}

BENEDETTO, G ^{[1
]}

SPAGNOLO, R ^{[1
]}

TURNATURI, M ^{[1
]}

机构：

[1] IRCI,TURIN,ITALY

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 114卷 / 02期

关键词：

D O I：

10.1002/pssa.2211140212

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：519 / 523

页数：5

共 13 条

[1] INFLUENCE OF DEFECTS AND OF INTERACTION BETWEEN THEM ON PHONON SCATTERING IN HEAVILY DOPED GE AND SI CRYSTALS
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[2] PHOTOACOUSTIC MEASUREMENT OF THE THERMAL EFFUSIVITY OF SOLIDS
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SPAGNOLO, R
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 46 (03): : 169 - 172
[3] PHOTO-ACOUSTIC MEASUREMENTS OF THERMAL-DIFFUSIVITY DESCRIPTION OF THE DRUM EFFECT
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BERTRAND, L
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) : 608 - 614
[4] PHOTOTHERMAL INVESTIGATION OF TRANSPORT IN SEMICONDUCTORS - THEORY AND EXPERIMENT
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AMER, NM
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (03) : 787 - 795
[5] PHOTOACOUSTIC STUDY OF THE THERMAL-DIFFUSIVITY OF METALLIC-GLASS RIBBONS
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BEIN, BK
PELZL, J
[J]. CANADIAN JOURNAL OF PHYSICS, 1986, 64 (09) : 1204 - 1207
[6] STRAY-LIGHT CORRECTION IN PHOTOACOUSTIC MEASUREMENTS OF SOLID SAMPLES
KRUEGER, S
KORDECKI, R
PELZL, J
BEIN, BK
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (01) : 55 - 61
[7] OPSAL J, 1985, 4TH INT TOP M PHOT T
[8] 2-BEAM PHOTOACOUSTIC PHASE MEASUREMENT OF THE THERMAL-DIFFUSIVITY OF SOLIDS
PESSOA, O
CESAR, CL
PATEL, NA
VARGAS, H
GHIZONI, CC
MIRANDA, LCM
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (04) : 1316 - 1318
[9] IMAGING OF DOPANT REGIONS IN SILICON WITH THERMAL-WAVE ELECTRON-MICROSCOPY
ROSENCWAIG, A
WHITE, RM
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (03) : 165 - 167
[10] THEORY OF PHOTOACOUSTIC EFFECT WITH SOLIDS
ROSENCWAIG, A
GERSHO, A
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (01) : 64 - 69

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