OPTICAL STUDIES OF HYDROGENATED AMORPHOUS-CARBON PLASMA DEPOSITION

被引：47

作者：

WAGNER, J

WILD, C

POHL, F

KOIDL, P

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 02期

关键词：

D O I：

10.1063/1.96967

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：106 / 108

页数：3

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