EPITAXIAL-GROWTH AND CHARACTERIZATION OF BETA-SIC THIN-FILMS

被引：196

作者：

LIAW, P ^{[1
]}

DAVIS, RF ^{[1
]}

机构：

[1] N CAROLINA STATE UNIV, DEPT MAT ENGN, RALEIGH, NC 27695 USA

来源：

关键词：

D O I：

10.1149/1.2113921

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：642 / 648

页数：7

共 33 条

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