SEMICONDUCTOR-BASED ELECTRET SENSORS FOR SOUND AND PRESSURE

被引:46
作者
VOORTHUYZEN, JA [1 ]
BERGVELD, P [1 ]
SPRENKELS, AJ [1 ]
机构
[1] TWENTE TECHNOL TRANSFER,ENSCHEDE,NETHERLANDS
来源
IEEE TRANSACTIONS ON ELECTRICAL INSULATION | 1989年 / 24卷 / 02期
关键词
D O I
10.1109/14.90285
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:267 / 276
页数:10
相关论文
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[2]  
SESSLER GM, 1980, TOPICS APPLIED PHYSI, V33
[3]  
SPRENKELS AJ, 1988, THESIS TWENTE U
[4]   THE PRESSFET - AN INTEGRATED ELECTRET MOSFET BASED PRESSURE SENSOR [J].
VOORTHUYZEN, JA ;
BERGVELD, P .
SENSORS AND ACTUATORS, 1988, 14 (04) :349-360
[5]  
VORRTHUYZEN JA, 1989, IEEE T ELECTR INS, V24