THE PRESSFET - AN INTEGRATED ELECTRET MOSFET BASED PRESSURE SENSOR

被引：21

作者：

VOORTHUYZEN, JA

BERGVELD, P

机构：

[1] Twente Univ of Technology, Netherlands

来源：

SENSORS AND ACTUATORS | 1988年 / 14卷 / 04期

关键词：

D O I：

10.1016/0250-6874(88)80024-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：349 / 360

页数：12

共 20 条

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