PRECIPITATION AS THE PHENOMENON RESPONSIBLE FOR THE ELECTRICALLY INACTIVE ARSENIC IN SILICON

被引：87

作者：

NOBILI, D

CARABELAS, A

CELOTTI, G

SOLMI, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 04期

关键词：

D O I：

10.1149/1.2119859

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：922 / 928

页数：7

共 32 条

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