HIGH-LEVEL CAD MELDS MICROMACHINED DEVICES WITH FOUNDRIES

被引：18

作者：

MARSHALL, JC

PARAMESWARAN, M

ZAGHLOUL, ME

GAITAN, M

机构：

[1] SIMON FRASER UNIV, SCH ENGN SCI, BURNABY V5A 1S6, BC, CANADA

[2] GEORGE WASHINGTON UNIV, SCH ENGN & APPL SCI, WASHINGTON, DC 20052 USA

来源：

IEEE CIRCUITS & DEVICES | 1992年 / 8卷 / 06期

关键词：

D O I：

10.1109/101.167507

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

[No abstract available]

引用

页码：10 / 17

页数：8

共 17 条

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