SCATTERING AND SPECTRAL SHAPE IN BALLISTIC-ELECTRON-EMISSION MICROSCOPY OF NISI2-SI(111) AND AU-SI SAMPLES

被引：19

作者：

HALLEN, HD ^{[1
]}

FERNANDEZ, A ^{[1
]}

HUANG, T ^{[1
]}

SILCOX, J ^{[1
]}

BUHRMAN, RA ^{[1
]}

机构：

[1] CORNELL UNIV,CTR MAT SCI,ITHACA,NY 14853

来源：

PHYSICAL REVIEW B | 1992年 / 46卷 / 11期

关键词：

D O I：

10.1103/PhysRevB.46.7256

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The ballistic-electron-emission microscopy (BEEM) tip voltage versus collector current spectral shape is used as a tool to study Au-Si and NiSi2-Si samples on a nanometer scale. A method is outlined for the extraction of an energy-dependent transmission factor from the BEEM spectra. Results for Au-Si samples compare favorably with theoretical interface transmission calculations. Data from both systems suggest that the shape of the spectra is influenced by scattering. The influence of scattering induced broadening of the injected electron transverse momentum distribution is considered.

引用

页码：7256 / 7259

页数：4

共 13 条

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