A DOUBLE DETECTOR SYSTEM FOR BSE AND SE IMAGING

被引:9
作者
AUTRATA, R
机构
关键词
D O I
10.1002/sca.4950060405
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:174 / 182
页数:9
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共 15 条
[1]   SINGLE-CRYSTAL OF YAG - NEW FAST SCINTILLATOR IN SEM [J].
AUTRATA, R ;
SCHAUER, P ;
KVAPIL, J ;
KVAPIL, J .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (07) :707-708
[2]  
AUTRATA R, 1983, SCANNING ELECTRON MI, V2, P489
[3]   WIDE-BAND DETECTOR FOR MICRO-MICROAMPERE LOW-ENERGY ELECTRON CURRENTS [J].
EVERHART, TE ;
THORNLEY, RFM .
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1960, 37 (07) :246-248
[5]  
JACKMANN JJ, 1980, IND RES DEV JUN, P115
[6]  
MURATA K, 1976, PHYS STATUS SOLIDI A, V36, P197, DOI 10.1002/pssa.2210360121
[7]  
REIMER L, 1980, ELECTRON MICROS, V3, P172
[8]  
REIMER L, 1980, I PHYS C SER, V52, P89
[9]  
REIMER L, 1978, SCANNING ELECTRON MI, V1, P705
[10]   CONSTRUCTION AND USES OF AN EFFICIENT BACKSCATTERED ELECTRON DETECTOR FOR SCANNING ELECTRON-MICROSCOPY [J].
ROBINSON, VN .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (08) :650-652