ANALYTICAL GROWTH MECHANISMS OF UNIAXIALLY ORIENTED FILMS IN ION-BASED PROCESSES

被引：4

作者：

MATSUBARA, K

FUKUMOTO, Y

TAKAGI, T

机构：

来源：

THIN SOLID FILMS | 1982年 / 92卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(82)90188-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：65 / 70

页数：6

共 11 条

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[7] OPTICAL AND THERMAL-PROPERTIES OF BEO THIN-FILMS PREPARED BY REACTIVE IONIZED-CLUSTER BEAM TECHNIQUE [J].

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[8] NEW DEVELOPMENTS IN IONIZED-CLUSTER BEAM AND REACTIVE IONIZED-CLUSTER BEAM DEPOSITION TECHNIQUES [J].

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[9]

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