P-CHANNEL MOSFETS IN LPCVD POLYSILICON

被引:11
作者
MALHI, SDS [1 ]
CHATTERJEE, PK [1 ]
PINIZZOTTO, RF [1 ]
LAM, HW [1 ]
CHEN, CEC [1 ]
SHICHIJO, H [1 ]
SHAH, RR [1 ]
BELLAVANCE, DW [1 ]
机构
[1] TEXAS INSTRUMENTS INC, MAT SCI LAB, DALLAS, TX 75265 USA
关键词
D O I
10.1109/EDL.1983.25767
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:369 / 371
页数:3
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