REVIEW OF LIMITATIONS OF ALUMINUM THIN-FILMS ON SEMICONDUCTOR-DEVICES

被引：35

作者：

PHILOFSKY, E ^{[1
]}

HALL, EL ^{[1
]}

机构：

[1] MOTOROLA CORP,SEMICOND PROD DIV,MAT RES LAB,PHOENIX,AZ 85008

来源：

IEEE TRANSACTIONS ON PARTS HYBRIDS AND PACKAGING | 1975年 / 11卷 / 04期

关键词：

D O I：

10.1109/TPHP.1975.1135077

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：281 / 290

页数：10

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