DIRECT TEM STUDY OF THE ROUGHENING OF SIO2 SI INTERFACE INDUCED DURING AES DEPTH PROFILING

被引：1

作者：

BARNA, PB

GOSZTOLA, L

ZALAR, A

RASIGNI, M

机构：

[1] INST ELECTR & VACUUM TECH, YU-61000 LJUBLJANA, YUGOSLAVIA

[2] UNIV AIX MARSEILLE 3, CTR ETUD COUCHES MINCES, F-13397 MARSEILLE 13, FRANCE

来源：

SURFACE AND INTERFACE ANALYSIS | 1986年 / 9卷 / 1-6期

关键词：

D O I：

10.1002/sia.740090512

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：328 / 328

页数：1

共 6 条

[1]

BARNA A, 1984, 8TH P EUR C EL MICR, P107

[2] SPUTTER-INDUCED ROUGHNESS IN THERMAL SIO2 DURING AUGER SPUTTER PROFILING STUDIES OF THE SI-SIO2 INTERFACE [J].

COOK, CF ;

HELMS, CR ;

FOX, DC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :44-46

[3] STUDY OF SURFACE-ROUGHNESS USING MICRO-DENSITOMETER ANALYSIS OF ELECTRON-MICROGRAPHS OF SURFACE REPLICAS .2. AUTOCOVARIANCE FUNCTIONS [J].

RASIGNI, M ;

RASIGNI, G ;

PALMARI, JP ;

LLEBARIA, A .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (10) :1230-1237

[4] STUDY OF SURFACE-ROUGHNESS USING A MICRO-DENSITOMETER ANALYSIS OF ELECTRON-MICROGRAPHS OF SURFACE REPLICAS .1. SURFACE PROFILES [J].

RASIGNI, M ;

RASIGNI, G ;

PALMARI, JP ;

LLEBARIA, A .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (09) :1124-1133

[5] ROUGHNESS CONTRIBUTIONS TO RESOLUTION IN ION SPUTTER DEPTH PROFILES OF POLYCRYSTALLINE METAL-FILMS [J].

SEAH, MP ;

JONES, ME .

THIN SOLID FILMS, 1984, 115 (03) :203-216

[6] IMPROVED DEPTH RESOLUTION BY SAMPLE ROTATION DURING AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING [J].

ZALAR, A .

THIN SOLID FILMS, 1985, 124 (3-4) :223-230

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