A LOW-CURRENT LIQUID-METAL ION-SOURCE

被引:40
作者
BELL, AE
RAO, K
SCHWIND, GA
SWANSON, LW
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.584325
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:927 / 930
页数:4
相关论文
共 11 条
[1]   PD-NI-SI-BE-B LIQUID-METAL ION-SOURCE FOR MASKLESS ION-IMPLANTATION [J].
ARIMOTO, H ;
TAKAMORI, A ;
MIYAUCHI, E ;
HASHIMOTO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (03) :L165-L166
[2]   THE INFLUENCE OF SUBSTRATE GEOMETRY ON THE EMISSION PROPERTIES OF A LIQUID-METAL ION-SOURCE [J].
BELL, AE ;
SWANSON, LW .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 41 (04) :335-346
[3]  
CAMBRIA TD, 1987, SOLID STATE TECHNOL, V30, P133
[4]   LONG-LIFETIME, RELIABLE LIQUID-METAL ION SOURCES FOR BORON, ARSENIC, AND PHOSPHORUS [J].
CLARK, WM ;
SELIGER, RL ;
UTLAUT, MW ;
BELL, AE ;
SWANSON, LW ;
SCHWIND, GA ;
JERGENSON, JB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :197-202
[5]   IONIZATION OF LIQUID-METALS, GALLIUM [J].
CULBERTSON, RJ ;
SAKURAI, T ;
ROBERTSON, GH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :574-576
[6]   SHAPE OF A LIQUID-METAL ION-SOURCE - A DYNAMIC-MODEL INCLUDING FLUID-FLOW AND SPACE-CHARGE EFFECTS [J].
KINGHAM, DR ;
SWANSON, LW .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :123-132
[7]  
KNAUER W, 1971, OPTIK, V54, P211
[8]  
MAIR GLR, 1983, MICROCIRCUIT ENG 83, P171
[9]  
MAYER HP, 1986, J PHYS PARIS, V47, pC7
[10]   VERTICAL NPN TRANSISTORS BY MASKLESS BORON IMPLANTATION [J].
REUSS, RH ;
MORGAN, D ;
GREENEICH, EW ;
CLARK, WM ;
RENSCH, DB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :62-66