LONG-LIFETIME, RELIABLE LIQUID-METAL ION SOURCES FOR BORON, ARSENIC, AND PHOSPHORUS

被引：30

作者：

CLARK, WM

SELIGER, RL

UTLAUT, MW

BELL, AE

SWANSON, LW

SCHWIND, GA

JERGENSON, JB

机构：

[1] OREGON GRAD CTR,BEAVERTON,OR 97006

[2] JERGENSON DESIGN & MFG,SANTA BARBARA,CA 93101

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583862

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：197 / 202

页数：6

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