A VERSATILE, SOFTWARE CONFIGURABLE MULTICHANNEL STEM DETECTOR FOR ANGLE-RESOLVED IMAGING

被引：32

作者：

HAIDER, M ^{[1
]}

EPSTEIN, A ^{[1
]}

JARRON, P ^{[1
]}

BOULIN, C ^{[1
]}

机构：

[1] CERN, GENEVA, SWITZERLAND

来源：

ULTRAMICROSCOPY | 1994年 / 54卷 / 01期

关键词：

D O I：

10.1016/0304-3991(94)90091-4

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A new type of STEM detector has been developed and tested. This detector consists of 30 rings which are split in quadrants (= 120 channels) and it allows further advantage to be taken of the image formation principle of STEM: the scattered electrons can be recorded separately according to their scattering angles and eight images can be acquired in parallel. Because of its electron counting capability, this detector is very well suited to analytical and quantitative applications of STEM (e.g. absolute mass determination and Z-contrast). The various channels of the detector can be combined by software in order to obtain images with the desired detector acceptance angles. The minimal time per pixel (t/pixel greater than or equal to 4 mu s) is approximately as short as in the case of conventional single-channel detectors.

引用

页码：41 / 59

页数：19

共 34 条

[1] DISCRIMINATION OF HEAVY AND LIGHT-ELEMENTS IN A SPECIMEN BY USE OF SCANNING-TRANSMISSION ELECTRON-MICROSCOPY [J].