MEASUREMENT OF CRYSTALLINE STRAIN AND ORIENTATION IN DIAMOND FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION

被引：41

作者：

SPECHT, ED

CLAUSING, RE

HEATHERLY, L

机构：

[1] Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge

来源：

JOURNAL OF MATERIALS RESEARCH | 1990年 / 5卷 / 11期

基金：

美国能源部;

关键词：

D O I：

10.1557/JMR.1990.2351

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have used x-ray diffraction to characterize diamond films grown in three characteristic morphologies by chemical vapor deposition. Each morphology has a fiber texture about the growth direction; we report the crystal axis aligned in this direction for each morphology. In all cases the average lattice constant agrees with that of bulk diamond; we report the range of strain in each sample. © 1990, Materials Research Society. All rights reserved.

引用

页码：2351 / 2355

页数：5

共 24 条

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