STRUCTURE FORMATION IN AMORPHOUS-CARBON FILMS UNDER INTERMEDIATE-ENERGY ION-BOMBARDMENT

被引：12

作者：

FOMINSKII, VY

MARKEEV, AM

NEVOLIN, VN

PROKOPENKO, VB

TRIPHONOV, AY

机构：

[1] Moscow Engineering Physics Institute, Moscow

来源：

VACUUM | 1993年 / 44卷 / 09期

关键词：

D O I：

10.1016/0042-207X(93)90241-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of intermediate energy ion (50 keV) irradiation on the structure and properties of amorphous carbon (a-C) graphite-like and diamond-like films was investigated. The C+ ions were implanted in a-C films during their laser plasma vacuum deposition (LPVD). The structure changes depend on the nature of the carbon films, on the fluence of irradiation and sample temperature.

引用

页码：873 / 877

页数：5

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