PREPARATION OF TIB2 AND TIBXNY COATINGS BY PACVD

被引：40

作者：

KARNER, H ^{[1
]}

LAIMER, J ^{[1
]}

STORI, H ^{[1
]}

RODHAMMER, P ^{[1
]}

机构：

[1] MET WERK PLANSEE,A-6600 REUTTE,AUSTRIA

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 39卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(89)90063-7

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：293 / 300

页数：8

共 9 条

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[3]

*MITTERER C, 1989, IN PRESS 12TH P PLAN

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[6] THE CHEMICAL VAPOR-DEPOSITION OF TIB2 FROM DIBORANE [J].

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[7]

PRATER JT, 1986, SURF COAT TECH, V29, P241

[8] DEPOSITION OF TIB2 FILMS BY A CO-SPUTTERING METHOD [J].

SHIKAMA, T ;

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OKADA, M .

THIN SOLID FILMS, 1988, 156 (02) :287-293

[9]

ZEMAN F, 1987, 8TH P INT C CHEM VAP, P87

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