CRYSTALLINE DIAMOND GROWTH IN THIN-FILMS DEPOSITED FROM A CH4-AR RF PLASMA

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1778 - 1782

[3] CHAIKOVSKII EF, 1981, SOV PHYS-CRYSTALLOGR, V26, P122

[4] NATURE OF CARBON-CARBON BONDING IN EVAPORATED AND ION-SPUTTERED (DIAMONDLIKE) AMORPHOUS-CARBON FROM (E,2E) SPECTROSCOPY [J]. PHYSICAL REVIEW LETTERS, 1989, 62 (08) : 945 - 948

[5] DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1976, 38 (02) : L17 - L19

[6] JANCA J, 1985, ACTA PHYS SLOVACA, V35, P118

[7] LARGE AREA CHEMICAL VAPOR-DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETOMICROWAVE PLASMA [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (06): : L1032 - L1034

[8] SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES - APPLICATION TO DIAMOND [J]. PHYSICAL REVIEW LETTERS, 1989, 62 (11) : 1290 - 1293

[9] EFFECT OF DILUTION GASES IN METHANE ON THE DEPOSITION OF DIAMOND-LIKE CARBON IN A MICROWAVE-DISCHARGE [J]. THIN SOLID FILMS, 1985, 128 (3-4) : 341 - 351

[10] ELECTRON-DIFFRACTION EVIDENCE FOR THREEFOLD COORDINATION IN AMORPHOUS HYDROGENATED CARBON-FILMS [J]. PHYSICAL REVIEW LETTERS, 1983, 51 (04) : 280 - 283

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1778 - 1782

[3] CHAIKOVSKII EF, 1981, SOV PHYS-CRYSTALLOGR, V26, P122

[4] NATURE OF CARBON-CARBON BONDING IN EVAPORATED AND ION-SPUTTERED (DIAMONDLIKE) AMORPHOUS-CARBON FROM (E,2E) SPECTROSCOPY [J]. PHYSICAL REVIEW LETTERS, 1989, 62 (08) : 945 - 948

[5] DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1976, 38 (02) : L17 - L19

[6] JANCA J, 1985, ACTA PHYS SLOVACA, V35, P118

[7] LARGE AREA CHEMICAL VAPOR-DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETOMICROWAVE PLASMA [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (06): : L1032 - L1034

[8] SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES - APPLICATION TO DIAMOND [J]. PHYSICAL REVIEW LETTERS, 1989, 62 (11) : 1290 - 1293

[9] EFFECT OF DILUTION GASES IN METHANE ON THE DEPOSITION OF DIAMOND-LIKE CARBON IN A MICROWAVE-DISCHARGE [J]. THIN SOLID FILMS, 1985, 128 (3-4) : 341 - 351

[10] ELECTRON-DIFFRACTION EVIDENCE FOR THREEFOLD COORDINATION IN AMORPHOUS HYDROGENATED CARBON-FILMS [J]. PHYSICAL REVIEW LETTERS, 1983, 51 (04) : 280 - 283