ENERGY-DISTRIBUTION OF ENERGETIC OXYGEN-ATOMS IN THE SPUTTERING OF ZNO

被引:9
作者
TOMINAGA, K
KUME, M
YUASA, T
TADA, O
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 01期
关键词
D O I
10.1143/JJAP.24.35
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:35 / 39
页数:5
相关论文
共 17 条
[1]  
AFROSIMOV VV, 1968, SOV PHYS TECH PHYS-U, V12, P1135
[2]   SPEED DISTRIBUTION OF MONATOMIC, DIATOMIC AND POLYATOMIC MOLECULAR-BEAMS SCATTERED BY THE (111) PLANE OF SILVER [J].
ASADA, H ;
MATSUI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (02) :259-263
[3]  
CUOMO JJ, 1977, IBM J RES DEV, V21, P580, DOI 10.1147/rd.216.0580
[4]   SIGNIFICANCE OF NEGATIVE-ION FORMATION IN SPUTTERING AND SIMS ANALYSIS [J].
CUOMO, JJ ;
GAMBINO, RJ ;
HARPER, JME ;
KUPTSIS, JD ;
WEBBER, JC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :281-287
[5]   EFFECT OF SECONDARY ELECTRONS AND NEGATIVE-IONS ON SPUTTERING OF FILMS [J].
HANAK, JJ ;
PELLICANE, JP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :406-409
[6]  
HARPER JME, 1978, J VAC SCI TECHNOL, V15, P1957
[7]   THE DETACHMENT OF ELECTRONS FROM NEGATIVE IONS [J].
HASTED, JB .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1954, 222 (1148) :74-83
[8]   IMAGE RESTORATION BY METHOD OF LEAST SQUARES [J].
HELSTROM, CW .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (03) :297-&
[9]  
ICHIMURA M, 1980, 1980 P INT C PLASM P, P350
[10]   SECONDARY-ELECTRON EJECTION FROM CONTAMINATED METAL-SURFACE BY HE AND AR ATOMS [J].
KADOTA, K ;
KANEKO, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (10) :1554-1561