EXCIMER LASER ANNEALED GOLD AND SILVER OHMIC CONTACTS ON N+-GAAS

被引：7

作者：

SIRCAR, P ^{[1
]}

机构：

[1] NORWICH UNIV,DEPT PHYS,NORTHFIELD,VT 05663

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 97卷 / 01期

关键词：

D O I：

10.1002/pssa.2210970148

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：K69 / &

共 8 条

[1]

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[4] RELIABILITY OF PULSED ELECTRON-BEAM-ALLOYED AUGE-PT OHMIC CONTACTS ON GAAS [J].

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[5] Q-SWITCHED RUBY-LASER ALLOYING OF OHMIC CONTACTS ON GALLIUM-ARSENIDE EPILAYERS [J].

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LEE, CP ;

YARIV, A .

APPLIED PHYSICS LETTERS, 1978, 33 (04) :346-347

[6] LASER ANNEALED OHMIC CONTACT TO N+-GAAS [J].

SIRCAR, P .

CANADIAN JOURNAL OF PHYSICS, 1983, 61 (08) :1218-1221

[7] PULSED UV LASER PROCESSED GOLD AND ALUMINUM OHMIC CONTACTS ON N+-GAAS [J].

SIRCAR, P ;

AUBIN, M .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 85 (02) :649-654

[8]

1978, AIP C P LASER SOLID

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