共 9 条
- [3] CHEMICAL VAPOR-DEPOSITION OF SILICON USING A CO2-LASER [J]. APPLIED PHYSICS LETTERS, 1978, 32 (04) : 254 - 256
- [5] GOLDBERG YA, 1970, SOV PHYS SEMICOND+, V3, P1447
- [8] SHTYRKOV EI, 1975, SOV PHYS SEMICOND+, V9, P1309
- [9] LASER ANNEALING OF BORON-IMPLANTED SILICON [J]. APPLIED PHYSICS LETTERS, 1978, 32 (03) : 139 - 141