COMPARISON OF THE NUCLEAR-REACTIONS O-18(P,ALPHA)N-15 AND O-16(D,ALPHA)N-14 TO STUDY THE OXYGEN EFFECTS IN PT SILICIDE FORMATION

被引：9

作者：

LIEN, CD

WIELUNSKI, L

NICOLET, MA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 213卷 / 2-3期

关键词：

D O I：

10.1016/0167-5087(83)90442-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：463 / 467

页数：5

共 21 条

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[15] IMPLANTED OXYGEN IN NISI FORMATION
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NICOLET, MA
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 66 (02): : 773 - 778
[16] MODIFICATION OF NICKEL SILICIDE FORMATION BY OXYGEN IMPLANTATION
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NICOLET, MA
[J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 655 - 660
[17] SCOTT DM, 1982, THESIS CALIFORNIA I
[18] SCOTT DM, 1980, P S THIN FILM INTERF, V80, P148
[19] TUROS, 1973, ACTA PHYS POLONICA A, V43, P657
[20] USE OF NUCLEAR-REACTION O-16(D,ALPHA)N-14 IN MICROANALYSIS OF OXIDE SURFACE-LAYERS
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WIELUNSKI, L
BARCZ, A
[J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 111 (03): : 605 - 610