MICROWAVE PERFORMANCE OF 0.4-MU-M GATE METAMORPHIC IN0.29AL0.71AS IN0.3GA0.7AS HEMT ON GAAS SUBSTRATE

被引:25
作者
WIN, P [1 ]
DRUELLE, Y [1 ]
LEGRY, P [1 ]
LEPILLIET, S [1 ]
CAPPY, A [1 ]
CORDIER, Y [1 ]
FAVRE, J [1 ]
机构
[1] THOMSON LCR,CENT RECH LAB,F-91401 ORSAY,FRANCE
关键词
TRANSISTORS; SEMICONDUCTOR DEVICES AND MATERIALS;
D O I
10.1049/el:19930114
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
MBE grown metamorphic In0.29Al0.71As/In0.3Ga0.7As/GaAs high electron mobility transistors have been successfully fabricated. A 0.4 mum triangular gate device showed transconductance as high as 700 mS/mm at a current density of 230 mA/mm. The measured f(T) was 45 GHz and f(max) was 115 GHz. These high values are, to the author's knowledge, the first reported for submicrometre metamorphic InAlAs/InGaAs/GaAs HEMTs with an indium content of 30%.
引用
收藏
页码:169 / 170
页数:2
相关论文
共 4 条
[1]   METAMORPHIC INYGA1-YAS/INZAL1-ZAS HETEROSTRUCTURE FIELD-EFFECT TRANSISTORS GROWN ON GAAS (001) SUBSTRATES USING MOLECULAR-BEAM EPITAXY [J].
GRIDER, DE ;
SWIRHUN, SE ;
NARUM, DH ;
AKINWANDE, AI ;
NOHAVA, TE ;
STUART, WR ;
JOSLYN, P ;
HSIEH, KC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (02) :301-304
[2]   ULTRA-HIGH-SPEED MODULATION-DOPED FIELD-EFFECT TRANSISTORS - A TUTORIAL REVIEW [J].
NGUYEN, LD ;
LARSON, LE ;
MISHRA, UK .
PROCEEDINGS OF THE IEEE, 1992, 80 (04) :494-518
[3]   METAMORPHIC IN0.3GA0.7AS/IN0.29AL0.71AS LAYER ON GAAS - A NEW STRUCTURE FOR HIGH-PERFORMANCE HIGH ELECTRON-MOBILITY TRANSISTOR REALIZATION [J].
WIN, P ;
DRUELLE, Y ;
CAPPY, A ;
CORDIER, Y ;
FAVRE, J ;
BOUILLET, C .
APPLIED PHYSICS LETTERS, 1992, 61 (08) :922-924
[4]  
WIN P, 1992, 22ND P EUR SOL STAT, P317