MODEL OF PLASMA IMMERSION ION-IMPLANTATION

被引：255

作者：

LIEBERMAN, MA ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 07期

关键词：

D O I：

10.1063/1.344172

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2926 / 2929

页数：4

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