LASER IRRADIATION OF CHEMISORBED OXYGEN ON SI(111) - ELECTRONIC STATES AND CLUMP FORMATION OF SIO2

被引：3

作者：

SCHELLSOROKIN, AJ

DEMUTH, JE

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 39卷 / 01期

关键词：

D O I：

10.1007/BF01177159

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：13 / 20

页数：8

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