CO DIFFUSION AND GROWTH OF BURIED SINGLE-CRYSTAL COSI2 IN SI(111) BY ENDOTAXY

At a growth temperature of 800-degrees-C, Co deposited on a Si capping layer exhibits oriented growth on buried CoSi2 grains on Si (111), a process referred to as endotaxy. This occurs preferentially to surface nucleation of CoSi2, provided the thickness of the Si cap is less than a critical value of almost-equal-to 100 nm for deposition rates of 0.003-0.01 nm/s. The steady-state process is modeled using known values of the Co diffusion coefficient and solid solubility in Si, allowing some conclusions to be drawn regarding parameters relevant to CoSi2 epitaxy. Using this technique, single-crystal continuous layers of CoSi2 can be formed under a high-quality Si capping layer.