The use of composite piezoelectric thick films for actuation and control of miniature cantilevers

被引：9

作者：

Jenkins, DFL

Cunningham, MJ

Clegg, WW

机构：

[1] Division of Electrical Engineering, Manchester School of Engineering, University of Manchester, Manchester, M13 9PL England, Oxford Road

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1016/0167-9317(95)00117-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A control and actuation system is described which utilises a single active piezoelectric composite thick film and optical vibration sensing. This system enables unwanted vibrations of the cantilever to be cancelled, whilst maintaining the ability to deflect the cantilever statically or dynamically as required. The use of such piezoelectric elements in scanning probe microscopes is discussed.

引用

页码：71 / 74

页数：4

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