MODEL OF RF DISCHARGES AT FREQUENCIES GREATER THAN THE IONIC PLASMA FREQUENCY

被引：17

作者：

POINTU, AM

机构：

来源：

关键词：

D O I：

10.1063/1.97965

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1047 / 1049

页数：3

共 8 条

[1]

Godyak V. A., 1975, SOV J PLASMA PHYS, V1, P276

[2] RF SPUTTERING VOLTAGE DIVISION BETWEEN 2 ELECTRODES [J].

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KELLER, JH ;

PENNEBAKER, WB .

[4] APPLICATION OF RF DISCHARGES TO SPUTTERING [J].

KOENIG, HR ;

MAISSEL, LI .

[5]

KOHLER K, 1985, J APPL PHYS, V58, P3350, DOI 10.1063/1.335797

POINTU, AM .

POINTU, AM .

[8] A MODEL OF RADIOFREQUENCY PLANAR DISCHARGES [J].

POINTU, AM .