CALORIMETRIC MEASUREMENT OF THE AVERAGE ENERGY OF SPUTTERED METAL-ATOMS

被引:8
作者
WEIJSENFELD, CH
机构
来源
PHYSICS LETTERS | 1962年 / 2卷 / 06期
关键词
D O I
10.1016/0031-9163(62)90046-X
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
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收藏
页码:295 / 296
页数:2
相关论文
共 7 条
[1]  
KOEDAM M, 1961, PHILIPS RES REP, V16, P101
[2]  
KOEDAM M, 1961, PHILIPS RES REP, V16, P266
[3]   SPUTTERING YIELDS OF METALS FOR AR+ AND NE+ IONS WITH ENERGIES FROM 50 TO 600 EV [J].
LAEGREID, N ;
WEHNER, GK .
JOURNAL OF APPLIED PHYSICS, 1961, 32 (03) :365-&
[4]   SPUTTERING YIELDS FOR LOW ENERGY HE+-, KR+-, AND XE+-ION BOMBARDMENT [J].
ROSENBERG, D ;
WEHNER, GK .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) :1842-&
[5]   FORCES ON ION-BOMBARDED ELECTRODES IN A LOW-PRESSURE PLASMA [J].
WEHNER, GK .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (08) :1392-1397
[6]   VELOCITIES OF SPUTTERED ATOMS [J].
WEHNER, GK .
PHYSICAL REVIEW, 1959, 114 (05) :1270-1272
[7]   SPUTTERING OF POLYCRYSTALLINE METALS BY INERT GAS IONS OF LOW ENERGY (100-1000 EV) [J].
WEIJSENFELD, C ;
HOOGENDOORN, A ;
KOEDAM, M .
PHYSICA, 1961, 27 (08) :763-&