CHARACTERIZATION OF CERAMIC FILMS AND INTERFACES BY ELECTRON-MICROSCOPIC AND SPECTROSCOPIC TECHNIQUES

被引：14

作者：

ERDEMIR, A

CHENG, CC

机构：

来源：

关键词：

D O I：

10.1016/0304-3991(89)90254-4

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：266 / 276

页数：11

共 11 条

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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 500 - 503
[5] CROSS-SECTION PREPARATION FOR TEM OF FILM-SUBSTRATE COMBINATIONS WITH A LARGE DIFFERENCE IN SPUTTERING YIELDS
HELMERSSON, U
SUNDGREN, JE
[J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1986, 4 (04): : 361 - 369
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