ROUGHNESS STUDIES OF ION-BEAM PROCESSED MOLYBDENUM SURFACES

被引：11

作者：

BUABBUD, GH

MATHINE, DL

SNYDER, P

WOOLLAM, JA

POKER, D

BENNETT, J

INGRAM, D

PRONKO, PP

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830

[2] USN,CTR WEAP,MICHELSON LAB,DIV PHYS,CHINA LAKE,CA 93555

[3] UNIVERSAL ENERGY SYST,DAYTON,OH 45432

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 01期

关键词：

D O I：

10.1063/1.336873

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：257 / 262

页数：6

共 15 条

[1]

APPLETON BR, 1982, ADV ION IMPLANTATION, pCH5

[2] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

APPLIED OPTICS, 1975, 14 (01) :220-228

[3] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[4]

Azzam RMA, 1977, ELLIPSOMETRY POLARIZ

[5] STYLUS PROFILING INSTRUMENT FOR MEASURING STATISTICAL PROPERTIES OF SMOOTH OPTICAL-SURFACES [J].

BENNETT, JM ;

DANCY, JH .

APPLIED OPTICS, 1981, 20 (10) :1785-1802

[6] RELATION BETWEEN THE OPTICAL AND METALLURGICAL PROPERTIES OF POLISHED MOLYBDENUM MIRRORS [J].

BENNETT, JM ;

WONG, SM ;

KRAUSS, G .

APPLIED OPTICS, 1980, 19 (20) :3562-3584

[7] LOW-SCATTER MOLYBDENUM SURFACES [J].

BENNETT, JM ;

ARCHIBALD, PC ;

RAHN, JP ;

KLUGMAN, A .

APPLIED OPTICS, 1983, 22 (24) :4048-4055

[8] MULTIPLE-WAVELENGTH-ANGLE-OF-INCIDENCE ELLIPSOMETRY - APPLICATION TO SILICON-NITRIDE - GALLIUM-ARSENIDE STRUCTURES [J].

BUABBUD, GH ;

ALTEROVITZ, SA ;

BASHARA, NM ;

WOOLLAM, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :619-620

[9] PARAMETER CORRELATION AND PRECISION IN MULTIPLE-ANGLE ELLIPSOMETRY [J].

BUABBUD, GH ;

BASHARA, NM .

APPLIED OPTICS, 1981, 20 (17) :3020-3026

[10] OPTICAL-PROPERTIES OF CRO2 AND MOO2 FROM 0.1 TO 6 EV [J].

CHASE, LL .

PHYSICAL REVIEW B, 1974, 10 (06) :2226-2231

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