[CF3AU(CNME)] AS A PRECURSOR FOR CVD OF GOLD

被引:32
作者
DRYDEN, NH [1 ]
SHAPTER, JG [1 ]
COATSWORTH, LL [1 ]
NORTH, PR [1 ]
PUDDEPHATT, RJ [1 ]
机构
[1] UNIV WESTERN ONTARIO,DEPT CHEM,LONDON N6A 5B7,ONTARIO,CANADA
关键词
D O I
10.1021/cm00023a009
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
[No abstract available]
引用
收藏
页码:979 / 981
页数:3
相关论文
共 13 条
[1]  
AYLETT MR, 1986, CHEMTRONICS, V1, P146
[3]   LASER CHEMICAL VAPOR-DEPOSITION OF GOLD [J].
BAUM, TH ;
JONES, CR .
APPLIED PHYSICS LETTERS, 1985, 47 (05) :538-540
[4]   CHEMICAL VAPOR-DEPOSITION OF PLATINUM - NEW PRECURSORS AND THEIR PROPERTIES [J].
DRYDEN, NH ;
KUMAR, R ;
OU, E ;
RASHIDI, M ;
ROY, S ;
NORTON, PR ;
PUDDEPHATT, RJ ;
SCOTT, JD .
CHEMISTRY OF MATERIALS, 1991, 3 (04) :677-685
[5]   LASER WRITING OF HIGH-PURITY GOLD LINES [J].
JUBBER, M ;
WILSON, JIB ;
DAVIDSON, JL ;
FERNIE, PA ;
JOHN, P .
APPLIED PHYSICS LETTERS, 1989, 55 (14) :1477-1479
[6]   GOLD CRYSTAL-GROWTH BY PHOTOTHERMAL LASER-INDUCED CHEMICAL VAPOR-DEPOSITION [J].
KODAS, TT ;
BAUM, TH ;
COMITA, PB .
JOURNAL OF CRYSTAL GROWTH, 1988, 87 (2-3) :378-382
[7]   CHEMICAL VAPOR-DEPOSITION OF GOLD [J].
LARSON, CE ;
BAUM, TH ;
JACKSON, RL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (01) :266-266
[8]   LASER-INDUCED CVD OF GOLD USING NEW PRECURSORS [J].
MESSELHAUSER, J ;
FLINT, EB ;
SUHR, H .
APPLIED SURFACE SCIENCE, 1992, 54 :64-68
[9]   TRIFLUOROMETHYL DERIVATIVES OF THE TRANSITION-METAL ELEMENTS [J].
MORRISON, JA .
ADVANCES IN INORGANIC CHEMISTRY, 1983, 27 :293-316
[10]   KINETIC-STUDIES OF THE CHEMICAL VAPOR-DEPOSITION OF PLATINUM [J].
NIXON, B ;
NORTON, PR ;
OU, EC ;
PUDDEPHATT, RJ ;
ROY, S ;
YOUNG, PA .
CHEMISTRY OF MATERIALS, 1991, 3 (02) :222-224