KINETIC-STUDIES OF THE CHEMICAL VAPOR-DEPOSITION OF PLATINUM

被引：23

作者：

NIXON, B ^{[1
]}

NORTON, PR ^{[1
]}

OU, EC ^{[1
]}

PUDDEPHATT, RJ ^{[1
]}

ROY, S ^{[1
]}

YOUNG, PA ^{[1
]}

机构：

[1] UNIV WESTERN ONTARIO,DEPT CHEM,LONDON N6A 5B7,ONTARIO,CANADA

来源：

CHEMISTRY OF MATERIALS | 1991年 / 3卷 / 02期

关键词：

D O I：

10.1021/cm00014a007

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

页码：222 / 224

页数：3

共 11 条

[1] GAS-PHASE VERSUS SURFACE CONTRIBUTIONS TO PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATES
BRAICHOTTE, D
VANDENBERGH, H
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04): : 337 - 343
[2] LOW-TEMPERATURE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF PLATINUM
CHEN, YJ
KAESZ, HD
THRIDANDAM, H
HICKS, RF
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (17) : 1591 - 1592
[3] COLEHAMILTON DJ, 1989, MECHANISMS REACTIONS
[4] DIRECT WRITING OF METAL CONDUCTORS WITH NEAR-UV LIGHT
GILGEN, HH
CACOURIS, T
SHAW, PS
KRCHNAVEK, RR
OSGOOD, RM
[J]. APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1987, 42 (02): : 55 - 66
[5] TAILORED-ORGANOMETALLICS AS PRECURSORS FOR THE CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY PALLADIUM AND PLATINUM THIN-FILMS
GOZUM, JE
POLLINA, DM
JENSEN, JA
GIROLAMI, GS
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1988, 110 (08) : 2688 - 2689
[6] JESINSKI JM, 1987, ANNU REV PHYS CHEM, V38, P109
[7] LASER-DRIVEN CHEMICAL VAPOR-DEPOSITION OF PLATINUM AT ATMOSPHERIC-PRESSURE AND ROOM-TEMPERATURE FROM CPPT(CH3)3
KOPLITZ, LV
SHUH, DK
CHEN, YJ
WILLIAMS, RS
ZINK, JI
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (18) : 1705 - 1707
[8] NEW PRECURSORS FOR CHEMICAL VAPOR-DEPOSITION OF PLATINUM AND THE HYDROGEN EFFECT ON CVD
KUMAR, R
ROY, S
RASHIDI, M
PUDDEPHATT, RJ
[J]. POLYHEDRON, 1989, 8 (04) : 551 - 553
[9] CHEMICAL VAPOR-DEPOSITION OF THIN-FILM PLATINUM
RAND, MJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (05) : 686 - 693
[10] MECHANISM AND ENERGETICS OF REDUCTIVE ELIMINATION OF ETHANE FROM SOME TETRAMETHYLPLATINUM(IV) COMPLEXES
ROY, S
PUDDEPHATT, RJ
SCOTT, JD
[J]. JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 1989, (11): : 2121 - 2125

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