CHEMICAL VAPOR-DEPOSITION OF THIN-FILM PLATINUM

被引：106

作者：

RAND, MJ ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 05期

关键词：

D O I：

10.1149/1.2403534

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：686 / 693

页数：8

共 23 条

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