GENERATION OF RESIDUAL DEFORMATIONS BY PULSED ION-IMPLANTATION

被引：5

作者：

BRUHL, SP ^{[1
]}

SANCHEZ, G ^{[1
]}

STORTI, M ^{[1
]}

CARDONA, A ^{[1
]}

FEUGEAS, JN ^{[1
]}

KAUFMANN, GH ^{[1
]}

机构：

[1] INST DESARROLLO TECHNOL IND QUIM,RA-3000 SANTA FE,ARGENTINA

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1995年 / 28卷 / 08期

关键词：

D O I：

10.1088/0022-3727/28/8/014

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The generation of residual deformations on AISI 316 stainless steel submitted to pulsed ion implantation by means of a plasma focus device was investigated. It is shown that the residual deformation can be attributed to thermal stresses induced in the target by the strong and fast heating process due to the accelerated ions. A numerical simulation is presented as an attempt to explain the generation of these deformations. The model is based on the computation of the temperature distribution in the implanted zone and the calculation of the induced thermal stresses. The mechanical response of the whole specimen is then evaluated using the finite-element method. Numerical results are compared with those measured by means of a holographic method and reasonable agreement is obtained.

引用

页码：1655 / 1660

页数：6

共 19 条

[1] FORMATION OF DISLOCATIONS AND OTHER TYPES OF EXTENDED DEFECTS BY ION-IMPLANTATION [J].

AULEYTNER, J ;

MORAWIEC, J .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1993, 138 (02) :403-408

[2]

DEARNALEY G, 1991, SURF ENG, V7, P127

[3]

FEUGEAS J, 1992, MATER RES SOC SYMP P, V268, P389, DOI 10.1557/PROC-268-389

[4]

FEUGEAS J, 1990, 4 P LAT AM WORKSH PL, P150

[5]

FEUGEAS J, 1990, BRAZ J VACUUM APPL, V9, P118

[6]

FEUGEAS J, 1993, 1992 P IND APPL PLAS

[7] NITROGEN IMPLANTATION OF ALSL-304 STAINLESS-STEEL WITH A COAXIAL PLASMA GUN [J].

FEUGEAS, JN ;

LLONCH, EC ;

DEGONZALEZ, CO ;

GALAMBOS, G .

JOURNAL OF APPLIED PHYSICS, 1988, 64 (05) :2648-2651

[8]

FOERSTER CE, 1994, COMMUNICATION

[9]

Jakob M., 1949, HEAT TRANSF, V1

[10] EVALUATION OF RESIDUAL DEFORMATIONS GENERATED BY A PULSED ION IMPLANTER USING INTERFEROMETRIC PHASE MEASUREMENT [J].

KAUFMANN, GH ;

BRUHL, SP ;

GALIZZI, GE ;

FEUGEAS, JN .

OPTICS AND LASER TECHNOLOGY, 1995, 27 (01) :57-63

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