ON CHEMICAL COMPOSITION OF SURFACE FILMS PRODUCED ON GERMANIUM IN DIFFERENT ETCHANTS

被引：23

作者：

BECKMANN, KH

机构：

来源：

SURFACE SCIENCE | 1966年 / 5卷 / 02期

关键词：

D O I：

10.1016/0039-6028(66)90080-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：187 / &

共 14 条

[1] INVESTIGATION OF CHEMICAL PROPERTIES OF STAIN FILMS ON SILICON BY MEANS OF INFRARED SPECTROSCOPY [J].

BECKMANN, KH .

SURFACE SCIENCE, 1965, 3 (04) :314-&

[2] ETCHING GE WITH MIXTURES OF HF-H2O2-H2O [J].

BLOEM, J ;

VANVESSEM, JC .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (01) :33-36

[3]

CHUMAEVSKII NA, 1962, OPT SPECTROSC, V13, P37

[4]

DOR L, 1957, 27 P C CHEM INSTR, V3, P150

[5] SURFACE STUDIES ON SINGLE-CRYSTAL GERMANIUM [J].

ELLIS, SG .

JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) :1262-1269

[6] DERIVATIVES OF MONOGERMANE .1. VIBRATION-ROTATION SPECTRA OF GERMYL FLUORIDE AND BROMIDE [J].

GRIFFITHS, JE ;

SRIVASTAVA, TN ;

ONYSZCHUK, M .

CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1962, 40 (04) :579-&

[7] SURFACE CHEMISTRY FROM SPECTRAL ANALYSIS OF TOTALLY INTERNALLY REFLECTED RADIATION [J].

HARRICK, NJ .

JOURNAL OF PHYSICAL CHEMISTRY, 1960, 64 (09) :1110-1114

[8]

HERZBERG G, 1960, MOLECULAR SPECTRA MO, V2, P231

[9] INFRARED ABSORPTION AND OXYGEN CONTENT IN SILICON AND GERMANIUM [J].

KAISER, W ;

KECK, PH ;

LANGE, CF .

PHYSICAL REVIEW, 1956, 101 (04) :1264-1268

[10]

LECHNER F, 1932, SITZBER AKAD WISS MN, V141, P291

← 1 2 →