MICROACTUATORS WITH MOVING MAGNETS FOR LINEAR, TORSIONAL OR MULTIAXIAL MOTION

被引：27

作者：

WAGNER, B ^{[1
]}

BENECKE, W ^{[1
]}

ENGELMANN, G ^{[1
]}

SIMON, J ^{[1
]}

机构：

[1] TECH UNIV BERLIN,W-1000 BERLIN 65,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 32卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(92)80050-D

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Various types of actuators have been fabricated that make use of electromagnetic forces within micromachined silicon devices. An Nd-Fe-B permanent magnet is bonded to a movable silicon plate suspended by thin silicon beams. Planar coils are integrated monolithically on the chip to generate the driving magnetic field. Using a thick photoresist, gold lines with a thickness of 26-mu-m are electroplated. Different actuators for vertical, torsional and multiaxial motion have been investigated. Vertical and torsional deflections of the order of 100-mu-m and 10 degrees, respectively, have been obtained using a magnet with a typical dimension of 1 mm.

引用

页码：598 / 603

页数：6

共 13 条

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