SOME THERMODYNAMIC PROPERTIES OF AMORPHOUS SI

被引:23
作者
POATE, JM
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
D O I
10.1016/0167-5087(83)90802-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:211 / 217
页数:7
相关论文
共 25 条
[1]  
Anderson H. H., 1977, HYDROGEN STOPPING PO
[2]   PHASE-TRANSITIONS IN AMORPHOUS SI PRODUCED BY RAPID HEATING [J].
BAERI, P ;
FOTI, G ;
POATE, JM ;
CULLIS, AG .
PHYSICAL REVIEW LETTERS, 1980, 45 (25) :2036-2039
[3]  
BAGLEY BG, 1978, AIP C P, V50, P97
[4]  
CHEN HS, 1969, J APPL PHYS, V40, P4212
[5]   SUBSTRATE-ORIENTATION DEPENDENCE OF EPITAXIAL REGROWTH RATE FROM SI-IMPLANTED AMORPHOUS SIA [J].
CSEPREGI, L ;
KENNEDY, EF ;
MAYER, JW ;
SIGMON, TW .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) :3906-3911
[6]   TRANSITIONS TO DEFECTIVE CRYSTAL AND THE AMORPHOUS STATE INDUCED IN ELEMENTAL SI BY LASER QUENCHING [J].
CULLIS, AG ;
WEBBER, HC ;
CHEW, NG ;
POATE, JM ;
BAERI, P .
PHYSICAL REVIEW LETTERS, 1982, 49 (03) :219-222
[7]   ULTRARAPID CRYSTAL-GROWTH AND IMPURITY SEGREGATION IN AMORPHOUS-SILICON ANNEALED WITH SHORT Q-SWITCHED LASER-PULSES [J].
CULLIS, AG ;
WEBBER, HC ;
CHEW, NG .
APPLIED PHYSICS LETTERS, 1982, 40 (11) :998-1000
[8]  
DONOVAN EP, APPL PHYS LETT
[9]   TRANSITION-TEMPERATURES AND HEATS OF CRYSTALLIZATION OF AMORPHOUS GE,SI, AND GE1-XSIX ALLOYS DETERMINED BY SCANNING CALORIMETRY [J].
FAN, JCC ;
ANDERSON, CH .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (06) :4003-4006
[10]  
Hultgren RR, 1973, SELECTED VALUES THER