2-PHOTON LASER-INDUCED FLUORESCENCE MEASUREMENTS OF ABSOLUTE ATOMIC-HYDROGEN DENSITIES AND POWDER FORMATION IN A SILANE DISCHARGE

被引：14

作者：

CZARNETZKI, U

MIYAZAKI, K

KAJIWARA, T

MURAOKA, K

OKADA, T

MAEDA, M

SUZUKI, A

MATSUDA, A

机构：

[1] KYUSHU UNIV,DEPT ELECT ENGN,FUKUOKA 812,JAPAN

[2] ELECTROTECH LAB,UMEZONO,TSUKUBA 305,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 03期

关键词：

D O I：

10.1116/1.578831

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Absolute and spatially resolved hydrogen densities were measured in a silane radio frequency discharge by two-photon laser induced fluorescence spectroscopy. The excitation wavelength was 205 nm and the observation wavelength was 656 nm (Balmer alpha). Titration in a flow tube reactor was used for calibration of the detection system, enabling for the first time the determination of reliable absolute hydrogen densities in a silane discharge. In addition, spontaneous as well as laser induced powder formation was observed.

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页码：831 / 834

页数：4

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