QUANTIFICATION OF THE EFFECTS OF GENERATION VOLUME, SURFACE RECOMBINATION VELOCITY, AND DIFFUSION LENGTH ON THE ELECTRON-BEAM-INDUCED CURRENT AND ITS DERIVATIVE - DETERMINATION OF DIFFUSION LENGTHS IN THE LOW MICRON AND SUB-MICRON RANGES

被引：70

作者：

LUKE, KL

VONROOS, O

CHENG, LJ

机构：

[1] CALTECH,JET PROP LAB,PASADENA,CA 91109

[2] STANFORD UNIV,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 06期

关键词：

D O I：

10.1063/1.334382

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1978 / 1984

页数：7

相关论文

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