THE NATURE OF ISLAND FORMATION IN THE HOMOEPITAXIAL GROWTH OF GAAS(110)

被引:23
作者
HOLMES, DM
BELK, JG
SUDIJONO, JL
NEAVE, JH
JONES, TS
JOYCE, BA
机构
[1] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,DEPT CHEM,LONDON SW7 2AY,ENGLAND
[2] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,INTERDISCIPLINARY SEMICOND MAT RES CTR,LONDON SW7 2AB,ENGLAND
基金
英国工程与自然科学研究理事会;
关键词
ADSORPTION KINETICS; ATOM SOLID INTERACTIONS; EPITAXY; GALLIUM ARSENIDE; GROWTH; LOW INDEX SINGLE CRYSTAL SURFACES; MODELS OF SURFACE KINETICS; MOLECULAR BEAM EPITAXY; NUCLEATION; REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION (RHEED); SCANNING TUNNELING MICROSCOPY; SINGLE CRYSTAL EPITAXY; SURFACE DIFFUSION;
D O I
10.1016/0039-6028(95)00750-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The initial growth stages of GaAs(110) thin films by molecular beam epitaxy (MBE) have been studied by scanning tunnelling microscopy (STM). For depositions at 520 degrees C up to one monolayer, STM images confirm the layer-by-layer nature of growth as indicated by reflection high energy electron diffraction (RHEED) intensity oscillations. The dynamics of island nucleation and coalescence is similar to that previously observed on GaAs(001) surfaces, with the temporal variation in surface step density giving rise to the specular RHEED oscillations. However, surfaces obtained after the deposition of sub-monolayer coverages of GaAs at 520 degrees C show a striking growth morphology. The islands adopt a characteristic triangular shape, with {113}- and {115}-type steps and the apex directed along the [001] direction. This highly specific crystallographic shape suggests that nucleations occur at the base of the triangles.
引用
收藏
页码:133 / 141
页数:9
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