SIO2-SI N-TYPE INTERFACE INVESTIGATION WITH ELECTROCHEMICAL METHOD

被引：10

作者：

GERSHINSKII, AE ^{[1
]}

MIRONOVA, LV ^{[1
]}

CHEREPOV, EI ^{[1
]}

机构：

[1] ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1976年 / 38卷 / 01期

关键词：

D O I：

10.1002/pssa.2210380142

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：369 / 373

页数：5

共 15 条

[1] Aleksandrov L. N., 1972, Physica Status Solidi A, V11, P9, DOI 10.1002/pssa.2210110102
[2] OXIDE FILMS ON ELECTROLYTICALLY POLISHED COPPER SURFACES
ALLEN, JA
[J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1952, 48 (03): : 273 - 279
[3] CAMAZAKI S, 1971, JAPAN J APPL PHYS, V10, P1555
[4] LINE-SHAPE EXTRACTION ANALYSIS OF SILICON-OXIDE LAYERS ON SILICON BY CHANNELING EFFECT MEASUREMENTS
CHU, WK
LUGUJJO, E
MAYER, JW
SIGMON, TW
[J]. THIN SOLID FILMS, 1973, 19 (02) : 329 - 337
[5] ELKIN BI, 1957, VOPROSY METALLURGII, P142
[6] INVESTIGATION OF REACTIVE DIFFUSION IN THIN-FILM SYSTEM CU-TI
GERSHINSKII, AE
KHOROMENKO, AA
CHEREPOV, EI
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 31 (01): : 61 - 70
[7] KAZUMASA O, 1969, REV ELECTR COMMEN LA, V17, P70
[8] ANALYSIS OF FILMS ON COPPER BY COULOMETRIC REDUCTION
LAMBERT, RH
TREVOY, DJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1958, 105 (01) : 18 - 23
[9] LITOVCHENKO VG, 1972, FIZ TEKH POLUPROV, V6, P802
[10] INVESTIGATIONS OF MIS STRUCTURE INHOMOGENEITIES USING A SCANNING MERCURY PROBE
NAKHMANS.RS
DOBROVOL.PP
[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1973, 19 (01): : 225 - 241