CONCENTRATION PROFILES OF COMPOSING IONS IN RADIO-FREQUENCY SPUTTERED SR (ZR0.2TI0.8)O3 FILMS

被引：5

作者：

MATSUOKA, T

KUWATA, J

FUJITA, Y

ABE, A

机构：

来源：

关键词：

D O I：

10.1063/1.341488

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3512 / 3515

页数：4

共 7 条

DHARMADHIKARI, VS ;

GRANNEMANN, WW .

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[2]

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KOZAWAGUCHI, H ;

TSUJIYAMA, B ;

MURASE, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (07) :1028-1031

[4]

KUWATA J, 1985, JPN J APPL PHYS, V24, P413

[5] LOW-THRESHOLD-VOLTAGE THIN-FILM ELECTROLUMINESCENT DEVICES [J].

OKAMOTO, K ;

NASU, Y ;

HAMAKAWA, Y .

[6]

RASE DE, 1955, J AM CERAM SOC, V38, P111

[7]

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