OPTICAL TECHNIQUES FOR COMPOSITION MEASUREMENT OF BULK AND THIN-FILM CD1-YZNYTE

被引:62
作者
JOHNSON, SM
SEN, S
KONKEL, WH
KALISHER, MH
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.585378
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The composition of high-quality single-crystal bulk-grown Cd1-yZn(y)Te (0 less-than-or-equal-to y less-than-or-equal-to 0.2) was determined from precision lattice constant measurements for a total of 22 data points. These samples were used to develop calibration curves for an accurate, contactless, nondestructive optical determination of composition using either 300 K transmission measurements or 77 K photoluminescence measurements. The 300 K transmission technique is useful for bulk CdZnTe wafers while the 77 K PL technique is applicable to both bulk and thin-film CdZnTe. Both techniques are useful in determining Cd1-yZn(y)Te composition in the range (0 less-than-or-equal-to y less-than-or-equal-to 0.2) which covers the range needed for lattice-matching to Hg1-xCd(x)Te and Hg1-xZn(x)Te epitaxial layers. The ability to map sample composition with high precision is available with both techniques.
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页码:1897 / 1901
页数:5
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