ELECTRON AND CHEMICAL-KINETICS IN THE LOW-PRESSURE RF DISCHARGE ETCHING OF SILICON IN SF6

[1] BARDSLEY JN, 1964, ATOMIC COLLISION PRO

[2] THE INTERACTION POTENTIALS OF SF6 IONS IN SF6 PARENT GAS DETERMINED FROM MOBILITY DATA [J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 78 (04) : 1999 - 2007

[3] THEORY OF ELECTRON COLLISION EXPERIMENTS AT INTERMEDIATE AND HIGH GAS DENSITIES [J]. PHYSICAL REVIEW, 1966, 152 (01): : 81 - &

[4] CHANTRY PJ, 1985, COMMUNICATION

[5] PLASMA-ETCHING OF SI AND SIO2 IN SF6-O2 MIXTURES [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) : 162 - 167

[6] DAGOSTINO R, 1981, PLASMA CHEM PLASMA P, V1, P365

[7] ANISOTROPIC ETCHING OF SIO2 IN LOW-FREQUENCY CF4/O2 AND NF3/AR PLASMAS [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) : 242 - 252

[8] COMPUTER-SIMULATION OF A CF4 PLASMA-ETCHING SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (05) : 1522 - 1531

[9] SF6, A PREFERABLE ETCHANT FOR PLASMA-ETCHING SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (01) : 123 - 126

[10] Ellis H. W., 1978, Atomic Data and Nuclear Data Tables, V22, P179, DOI 10.1016/0092-640X(78)90014-1

[1] BARDSLEY JN, 1964, ATOMIC COLLISION PRO

[2] THE INTERACTION POTENTIALS OF SF6 IONS IN SF6 PARENT GAS DETERMINED FROM MOBILITY DATA [J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 78 (04) : 1999 - 2007

[3] THEORY OF ELECTRON COLLISION EXPERIMENTS AT INTERMEDIATE AND HIGH GAS DENSITIES [J]. PHYSICAL REVIEW, 1966, 152 (01): : 81 - &

[4] CHANTRY PJ, 1985, COMMUNICATION

[5] PLASMA-ETCHING OF SI AND SIO2 IN SF6-O2 MIXTURES [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) : 162 - 167

[6] DAGOSTINO R, 1981, PLASMA CHEM PLASMA P, V1, P365

[7] ANISOTROPIC ETCHING OF SIO2 IN LOW-FREQUENCY CF4/O2 AND NF3/AR PLASMAS [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) : 242 - 252

[8] COMPUTER-SIMULATION OF A CF4 PLASMA-ETCHING SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (05) : 1522 - 1531

[9] SF6, A PREFERABLE ETCHANT FOR PLASMA-ETCHING SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (01) : 123 - 126

[10] Ellis H. W., 1978, Atomic Data and Nuclear Data Tables, V22, P179, DOI 10.1016/0092-640X(78)90014-1