ELLIPSOMETRIC STUDY OF ORIENTATION-DEPENDENT ETCHING OF SILICON IN AQUEOUS KOH

被引：125

作者：

PALIK, ED

BERMUDEZ, VM

GLEMBOCKI, OJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 04期

关键词：

D O I：

10.1149/1.2113976

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

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页码：871 / 884

页数：14

相关论文

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