HYDROGEN DISSOCIATION AND INCORPORATION INTO AMORPHOUS-SILICON PRODUCED BY ELECTRON-BEAM EVAPORATION

被引：6

作者：

FRANGHIADAKIS, Y

TZANETAKIS, P

机构：

[1] UNIV CRETE,CRETE RES CTR,CRETE,GREECE

[2] UNIV CRETE,DEPT PHYS,CRETE,GREECE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.575742

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：136 / 143

页数：8

共 17 条

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